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激光分子束外延沉积

发布日期:2015/6/10 15:20:12

激光分子束外延沉积

    

  美国Neocera公司的P-180型超高真空脉冲激光分子束外延沉积系统:
 1. 18” 球型真空腔,全自动集成六靶靶盘,用于沉积单层膜、多层膜与超晶 格,计算机控制靶公转、自转和靶位选择;
 2. 真空系统低于 5*10-10Torr,基片加热温度可达850 oC;
 3. 高压反射高能电子衍射装置(RHEED)用于薄膜的单层水平控制;

     
     

     

代表性文章:

1. Lvkang Shen, Liang Wu, Quan Sheng, Chunrui Ma,* Yong Zhang, Lu Lu, Ji Ma, Jihong Bian, Yaodong Yang, Aiping Chen, Xiaoli Lu, Ming Liu,* Hong Wang, Chun-Lin Jia. "Epitaxial lift-off of centimeter-scaled spinel ferrite oxide thin films for flexible electronics". Advanced Materials, DOI: 10.1002/adma.201702411, 2017.

2. Yong Zhang, Lvkang Shen, Ming Liu,* Xin Li, Xiaoli Lu,* Lu Lu, Chunrui Ma, Caiyin You, Aiping Chen, Chuanwei Huang, Lang Chen, Marin Alexe, Chun-Lin Jia. "Flexible Quasi-Two-Dimensional CoFe2O4 Epitaxial Thin Films for Continuous Strain Tuning of Magnetic Properties". ACS Nano, DOI: 10.1021/acsnano.7b02637, 2017.

3. Lvkang Shen, Chunrui Ma,* Shaodong Cheng, Shengping Ren, Sheng Cheng, Shao-Bo Mi, Ming Liu. "Enhanced Magnetic Properties in Epitaxial Self-Assembled Vertically Aligned Nanocomposite (Pr0.5Ba0.5MnO3)0.5:(CeO2)0.5 Thin Films". Journal of Materials Chemistry C, 4: 10955-10961, 2016.


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